Granted Patent
Utility
US 4,642,162 · App. 06/815,603
Planarization of dielectric layers in integrated circuits
Inventors:
David J. Brownell, Daniel Christensen, David G. Erie, Daniel Youngner
Patented Case
View Patent ↗
Granted: Feb 10, 1987
Filed: Jan 2, 1986
Inventors
David J. Brownell
Daniel Christensen
David G. Erie
Daniel Youngner
Assignee (at issue)
Honeywell Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.