Granted Patent
Utility
US 4,647,207 · App. 06/737,534
Ellipsometric method and apparatus
Inventors:
Nils A. N. Bjork, Erland T. Sandstrom, Johan Stenberg, Lars Stiblert
Patented Case
View Patent ↗
Granted: Mar 3, 1987
Filed: May 24, 1985
Inventors
Nils A. N. Bjork
Erland T. Sandstrom
Johan Stenberg
Lars Stiblert
Assignee (at issue)
SAGAX Instrument AB
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.