Granted Patent
Utility
US 4,655,162 · App. 06/707,449
Semiconductor device manufacturing apparatus
Inventor:
Masaomi Kameyama
Patented Case
View Patent ↗
Granted: Apr 7, 1987
Filed: Mar 1, 1985
Inventor
Masaomi Kameyama
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.