IP Library Granted Patent US 4,655,678
Granted Patent Utility
US 4,655,678 · App. 06/704,384

Combined turbo-molecular pump

Inventor: Masaharu Miki
Patented Case View Patent ↗
Granted: Apr 7, 1987 Filed: Feb 22, 1985
Inventor
Masaharu Miki
Assignee (at issue)
Seiko Seiki Kabushiki Kaisha

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Quick Facts
Patent No.
US 4,655,678
App. No.
06/704,384
Filed
1985-02-22
Granted
1987-04-07
Kind
A