IP Library Granted Patent US 4,661,233
Granted Patent Utility
US 4,661,233 · App. 06/858,325

Cathode/ground shield arrangement in a sputter coating apparatus

Inventor: Albert D. Glasser
Patented Case View Patent ↗
Granted: Apr 28, 1987 Filed: May 1, 1986
Inventor
Albert D. Glasser
Assignee (at issue)
Westinghouse Electric Company LLC

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Quick Facts
Patent No.
US 4,661,233
App. No.
06/858,325
Filed
1986-05-01
Granted
1987-04-28
Kind
A