IP Library › Granted Patent US 4,664,133
Granted Patent Utility
US 4,664,133 · App. 06/891,111

Wafer processing machine

Inventors: James M. Silvernail, Dallas J. Schneider
Patented Case View Patent ↗
Granted: May 12, 1987 Filed: Jul 28, 1986
Inventors
James M. Silvernail
Dallas J. Schneider
Assignee (at issue)
FSI HOLDINGS, LLC

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Quick Facts
Patent No.
US 4,664,133
App. No.
06/891,111
Filed
1986-07-28
Granted
1987-05-12
Kind
A