Granted Patent
Utility
US 4,664,935 · App. 06/779,537
Thin film deposition apparatus and method
Inventor:
Thomas L. Strahl
Patented Case
View Patent ↗
Granted: May 12, 1987
Filed: Sep 24, 1985
Inventor
Thomas L. Strahl
Assignee (at issue)
Vaccine Technology Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.