Granted Patent
Utility
US 4,666,532 · App. 06/607,349
Denuding silicon substrates with oxygen and halogen
Inventors:
Harold W. Korb, Claudia P. Reed, Roger W. Shaw
Patented Case
View Patent ↗
Granted: May 19, 1987
Filed: May 4, 1984
Inventors
Harold W. Korb
Claudia P. Reed
Roger W. Shaw
Assignee (at issue)
Monsanto Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.