Granted Patent
Utility
US 4,667,415 · App. 06/802,734
Microlithographic reticle positioning system
Inventor:
Samuel M. Barsky
Patented Case
View Patent ↗
Granted: May 26, 1987
Filed: Nov 29, 1985
Inventor
Samuel M. Barsky
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.