IP Library Granted Patent US 4,668,080
Granted Patent Utility
US 4,668,080 · App. 06/803,006

Method and apparatus for forming large area high resolution patterns

Inventors: Michael T. Gale, Hans P. Kleinknecht, Karl H. Knop
Patented Case View Patent ↗
Granted: May 26, 1987 Filed: Nov 29, 1985
Inventors
Michael T. Gale
Hans P. Kleinknecht
Karl H. Knop
Assignee (at issue)
RCA Corporation

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Quick Facts
Patent No.
US 4,668,080
App. No.
06/803,006
Filed
1985-11-29
Granted
1987-05-26
Kind
A