IP Library Granted Patent US 4,668,083
Granted Patent Utility
US 4,668,083 · App. 06/799,390

Contact lithographic fabrication of patterns on large optics

Inventors: Prasad R. Akkapeddi, Robert E. Hufnagel
Patented Case View Patent ↗
Granted: May 26, 1987 Filed: Nov 18, 1985
Inventors
Prasad R. Akkapeddi
Robert E. Hufnagel
Assignee (at issue)
PerkinElmer, Inc.

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Quick Facts
Patent No.
US 4,668,083
App. No.
06/799,390
Filed
1985-11-18
Granted
1987-05-26
Kind
A