IP Library Granted Patent US 4,673,799
Granted Patent Utility
US 4,673,799 · App. 06/707,262

Fluidized bed heater for semiconductor processing

Inventor: Imad Mahawili
Patented Case View Patent ↗
Granted: Jun 16, 1987 Filed: Mar 1, 1985
Inventor
Imad Mahawili
Assignee (at issue)
Focus Semiconductor Systems, Inc.

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Quick Facts
Patent No.
US 4,673,799
App. No.
06/707,262
Filed
1985-03-01
Granted
1987-06-16
Kind
A