Granted Patent
Utility
US 4,675,528 · App. 06/750,081
Method for measurement of spotsize and edgewidth in electron beam lithography
Inventors:
Guenther O. Langner, Kenneth J. Harte, Michael Dalterio, Marvin Fishbein
Patented Case
View Patent ↗
Granted: Jun 23, 1987
Filed: Jun 28, 1985
Inventors
Guenther O. Langner
Kenneth J. Harte
Michael Dalterio
Marvin Fishbein
Assignee (at issue)
Control Data Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.