Granted Patent
Utility
US 4,676,868 · App. 06/855,207
Method for planarizing semiconductor substrates
Inventors:
Paul E. Riley, Alan B. Ray, Paul Joseph Bayer
Patented Case
View Patent ↗
Granted: Jun 30, 1987
Filed: Apr 23, 1986
Inventors
Paul E. Riley
Alan B. Ray
Paul Joseph Bayer
Assignee (at issue)
FAIRCHILD SEMICONDUCTOR CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.