IP Library Granted Patent US 4,676,967
Granted Patent Utility
US 4,676,967 · App. 06/363,823

High purity silane and silicon production

Inventor: William C. Breneman
Patented Case View Patent ↗
Granted: Jun 30, 1987 Filed: Mar 31, 1982
Inventor
William C. Breneman
Assignee (at issue)
Union Carbide Corporation

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Quick Facts
Patent No.
US 4,676,967
App. No.
06/363,823
Filed
1982-03-31
Granted
1987-06-30
Kind
A