Granted Patent
Utility
US 4,679,942 · App. 06/703,941
Method of aligning a semiconductor substrate and a photomask
Inventors:
Kyoichi Suwa, Hidemi Kawai, Masaichi Murakami
Patented Case
View Patent ↗
Granted: Jul 14, 1987
Filed: Feb 21, 1985
Inventors
Kyoichi Suwa
Hidemi Kawai
Masaichi Murakami
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.