Granted Patent
Utility
US 4,680,447 · App. 06/756,739
Cooled optical window for semiconductor wafer heating
Inventor:
Imad Mahawili
Patented Case
View Patent ↗
Granted: Jul 14, 1987
Filed: Jul 19, 1985
Inventor
Imad Mahawili
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.