IP Library › Granted Patent US 4,685,206
Granted Patent Utility
US 4,685,206 · App. 06/803,437

Positioning apparatus for a circular substrate

Inventors: Jiro Kobayashi, Koichi Yoshikawa
Patented Case View Patent ↗
Granted: Aug 11, 1987 Filed: Dec 2, 1985
Inventors
Jiro Kobayashi
Koichi Yoshikawa
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,685,206
App. No.
06/803,437
Filed
1985-12-02
Granted
1987-08-11
Kind
A