Granted Patent
Utility
US 4,686,113 · App. 06/810,954
Plasma confinement in a low pressure electrically grounded R.F. heated reactor and deposition method
Inventors:
Michelangelo Delfino, Bruce R. Cairns
Patented Case
View Patent ↗
Granted: Aug 11, 1987
Filed: Dec 18, 1985
Inventors
Michelangelo Delfino
Bruce R. Cairns
Assignee (at issue)
FAIRCHILD SEMICONDUCTOR CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.