Granted Patent
Utility
US 4,687,097 · App. 06/680,516
Wafer processing cassette
Inventor:
Roger L. Mortensen
Patented Case
View Patent ↗
Granted: Aug 18, 1987
Filed: Dec 11, 1984
Inventor
Roger L. Mortensen
Assignee (at issue)
Empak, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.