IP Library Granted Patent US 4,687,940
Granted Patent Utility
US 4,687,940 · App. 06/842,103

Hybrid focused-flood ion beam system and method

Inventors: J. William Ward, John L. Bartelt, Robert L. Seliger, Charles M. McKenna
Patented Case View Patent ↗
Granted: Aug 18, 1987 Filed: Mar 20, 1986
Inventors
J. William Ward
John L. Bartelt
Robert L. Seliger
Charles M. McKenna
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 4,687,940
App. No.
06/842,103
Filed
1986-03-20
Granted
1987-08-18
Kind
A