IP Library › Granted Patent US 4,690,528
Granted Patent Utility
US 4,690,528 · App. 06/656,746

Projection exposure apparatus

Inventors: Akikazu Tanimoto, Kazunori Imamura
Patented Case View Patent ↗
Granted: Sep 1, 1987 Filed: Oct 1, 1984
Inventors
Akikazu Tanimoto
Kazunori Imamura
Assignee (at issue)
Nippon Kogaku K.K.

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Quick Facts
Patent No.
US 4,690,528
App. No.
06/656,746
Filed
1984-10-01
Granted
1987-09-01
Kind
A