Granted Patent
Utility
US 4,690,730 · App. 06/876,947
Oxide-capped titanium silicide formation
Inventors:
Thomas E. Tang, Che-Chia Wei, Roger A. Haken, Thomas C. Holloway, David A. Bell
Patented Case
View Patent ↗
Granted: Sep 1, 1987
Filed: Jun 20, 1986
Inventors
Thomas E. Tang
Che-Chia Wei
Roger A. Haken
Thomas C. Holloway
David A. Bell
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.