Granted Patent
Utility
US 4,690,746 · App. 06/832,836
Interlayer dielectric process
Inventors:
Edward J. McInerney, E. Ronald Dornseif, Norman E. Zetterquist
Patented Case
View Patent ↗
Granted: Sep 1, 1987
Filed: Feb 24, 1986
Inventors
Edward J. McInerney
E. Ronald Dornseif
Norman E. Zetterquist
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.