Granted Patent
Utility
US 4,692,115 · App. 06/880,422
Semiconductor wafer furnace door
Inventors:
Robert Aldridge, Russell Elloway, William O. Fritz, Ralph D. Goff, Michael J. Herrera
Patented Case
View Patent ↗
Granted: Sep 8, 1987
Filed: Jun 30, 1986
Inventors
Robert Aldridge
Russell Elloway
William O. Fritz
Ralph D. Goff
Michael J. Herrera
Assignee (at issue)
Thermco Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.