Granted Patent
Utility
US 4,694,178 · App. 06/749,796
Multiple channel electron beam optical column lithography system and method of operation
Inventor:
Kenneth J. Harte
Patented Case
View Patent ↗
Granted: Sep 15, 1987
Filed: Jun 28, 1985
Inventor
Kenneth J. Harte
Assignee (at issue)
Control Data Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.