IP Library Granted Patent US 4,696,758
Granted Patent Utility
US 4,696,758 · App. 06/897,236

Gas mixtures for the vapor deposition of semiconductor material

Inventors: Stanford R. Ovshinsky, Subhendu Guha, Prem Nath, Chi C. Yang, Jeffrey P. Fournier, James Kulman
Patented Case View Patent ↗
Granted: Sep 29, 1987 Filed: Oct 6, 1986
Inventors
Stanford R. Ovshinsky
Subhendu Guha
Prem Nath
Chi C. Yang
Jeffrey P. Fournier
James Kulman
Assignee (at issue)
Energy Conversion Devices, Inc.

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Quick Facts
Patent No.
US 4,696,758
App. No.
06/897,236
Filed
1986-10-06
Granted
1987-09-29
Kind
A