Granted Patent
Utility
US 4,698,316 · App. 06/802,994
Method of depositing uniformly thick selective epitaxial silicon
Inventors:
John F. Corboy, Jr., Robert H. Pagliaro, Jr., Lubomir L. Jastrzebski, Ramazan Soydan
Patented Case
View Patent ↗
Granted: Oct 6, 1987
Filed: Nov 29, 1985
Inventors
John F. Corboy, Jr.
Robert H. Pagliaro, Jr.
Lubomir L. Jastrzebski
Ramazan Soydan
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.