IP Library › Granted Patent US 4,701,300
Granted Patent Utility
US 4,701,300 · App. 06/818,950

Polyamide ester photoresist formulations of enhanced sensitivity

Inventors: Hans-Joachim Merrem, Rudolf Klug, Thomas Herold
Patented Case View Patent ↗
Granted: Oct 20, 1987 Filed: Jan 15, 1986
Inventors
Hans-Joachim Merrem
Rudolf Klug
Thomas Herold
Assignee (at issue)
Merck Patent GmbH

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Quick Facts
Patent No.
US 4,701,300
App. No.
06/818,950
Filed
1986-01-15
Granted
1987-10-20
Kind
A