Granted Patent
Utility
US 4,705,597 · App. 06/723,239
Photoresist tapering process
Inventors:
George E. Gimpelson, Cheryl L. Holbrook, Anthony L. Rivoli
Patented Case
View Patent ↗
Granted: Nov 10, 1987
Filed: Apr 15, 1985
Inventors
George E. Gimpelson
Cheryl L. Holbrook
Anthony L. Rivoli
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.