Granted Patent
Utility
US 4,711,567 · App. 06/897,644
Exposure apparatus
Inventor:
Akikazu Tanimoto
Patented Case
View Patent ↗
Granted: Dec 8, 1987
Filed: Aug 18, 1986
Inventor
Akikazu Tanimoto
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.