IP Library Granted Patent US 4,714,520
Granted Patent Utility
US 4,714,520 · App. 06/759,621

Method for filling a trench in an integrated circuit structure without producing voids

Inventor: Peter S. Gwozdz
Patented Case View Patent ↗
Granted: Dec 22, 1987 Filed: Jul 25, 1985
Inventor
Peter S. Gwozdz
Assignee (at issue)
Advanced Micro Devices, Inc.

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Quick Facts
Patent No.
US 4,714,520
App. No.
06/759,621
Filed
1985-07-25
Granted
1987-12-22
Kind
A