Granted Patent
Utility
US 4,716,299 · App. 06/821,743
Apparatus for conveying and inspecting a substrate
Inventors:
Hiroshi Tanaka, Hiromitsu Iwata, Yukio Kakizaki
Patented Case
View Patent ↗
Granted: Dec 29, 1987
Filed: Jan 23, 1986
Inventors
Hiroshi Tanaka
Hiromitsu Iwata
Yukio Kakizaki
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.