Granted Patent
Utility
US 4,717,829 · App. 06/051,269
Platen and beam setup flag assembly for ion implanter
Inventor:
Norman L. Turner
Patented Case
View Patent ↗
Granted: Jan 5, 1988
Filed: May 4, 1987
Inventor
Norman L. Turner
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.