Granted Patent
Utility
US 4,718,019 · App. 06/749,644
Election beam exposure system and an apparatus for carrying out a pattern unwinder
Inventors:
Timothy I. Fillion, Marc BERGERON, Andrey Varpahovsky
Patented Case
View Patent ↗
Granted: Jan 5, 1988
Filed: Jun 28, 1985
Inventors
Timothy I. Fillion
Marc BERGERON
Andrey Varpahovsky
Assignee (at issue)
Control Data Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.