Granted Patent
Utility
US 4,723,221 · App. 07/059,193
Method for manufacturing semiconductor device and apparatus therefor
Inventors:
Toshio Matsuura, Satoru Shikata
Patented Case
View Patent ↗
Granted: Feb 2, 1988
Filed: Jun 5, 1987
Inventors
Toshio Matsuura
Satoru Shikata
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.