Granted Patent
Utility
US 4,723,967 · App. 07/043,168
Valve block and container for semiconductor source reagent dispensing and/or purification
Inventor:
Glenn M. Tom
Patented Case
View Patent ↗
Granted: Feb 9, 1988
Filed: Apr 27, 1987
Inventor
Glenn M. Tom
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.