Granted Patent
Utility
US 4,724,796 · App. 06/941,825
Vaporization arrangement with a rectangular vaporization crucible and several electron guns
Inventors:
Horst Ranke, Volker Bauer, Albert Feuerstein, Walter Dietrich
Patented Case
View Patent ↗
Granted: Feb 16, 1988
Filed: Dec 15, 1986
Inventors
Horst Ranke
Volker Bauer
Albert Feuerstein
Walter Dietrich
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.