Granted Patent
Utility
US 4,726,689 · App. 06/921,435
Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
Inventor:
John D. Pollock
Patented Case
View Patent ↗
Granted: Feb 23, 1988
Filed: Oct 22, 1986
Inventor
John D. Pollock
Assignee (at issue)
Eclipse Ion Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.