Granted Patent
Utility
US 4,727,993 · App. 07/018,770
Wafer cassette having multi-directional access
Inventors:
Ninko T. Mirkovich, John Zajac
Patented Case
View Patent ↗
Granted: Mar 1, 1988
Filed: Mar 2, 1987
Inventors
Ninko T. Mirkovich
John Zajac
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.