IP Library Granted Patent US 4,728,246
Granted Patent Utility
US 4,728,246 · App. 06/863,963

Wafer boat transfer tool

Inventor: William R. Mello
Patented Case View Patent ↗
Granted: Mar 1, 1988 Filed: May 16, 1986
Inventor
William R. Mello
Assignee (at issue)
Thermco Systems, Inc.

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Quick Facts
Patent No.
US 4,728,246
App. No.
06/863,963
Filed
1986-05-16
Granted
1988-03-01
Kind
A