IP Library Granted Patent US 4,728,406
Granted Patent Utility
US 4,728,406 · App. 06/897,246

Method for plasma - coating a semiconductor body

Inventors: Arindam Banerjee, Prem Nath, Herbert C. Ovshinsky
Patented Case View Patent ↗
Granted: Mar 1, 1988 Filed: Aug 18, 1986
Inventors
Arindam Banerjee
Prem Nath
Herbert C. Ovshinsky
Assignee (at issue)
Energy Conversion Devices, Inc.

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Quick Facts
Patent No.
US 4,728,406
App. No.
06/897,246
Filed
1986-08-18
Granted
1988-03-01
Kind
A