Granted Patent
Utility
US 4,728,799 · App. 07/004,235
Height measurement and correction method for electron beam lithography system
Inventors:
James Gordon, Kenneth J. Harte, Vijay K. Singhal
Patented Case
View Patent ↗
Granted: Mar 1, 1988
Filed: Jan 5, 1987
Inventors
James Gordon
Kenneth J. Harte
Vijay K. Singhal
Assignee (at issue)
Control Data Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.