IP Library Granted Patent US 4,732,110
Granted Patent Utility
US 4,732,110 · App. 07/045,258

Inverted positive vertical flow chemical vapor deposition reactor chamber

Inventor: James D. Parsons
Patented Case View Patent ↗
Granted: Mar 22, 1988 Filed: Apr 20, 1987
Inventor
James D. Parsons
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 4,732,110
App. No.
07/045,258
Filed
1987-04-20
Granted
1988-03-22
Kind
A