Granted Patent
Utility
US 4,734,183 · App. 06/896,939
Sputtering cathode on the magnetron principle
Inventors:
Peter Wirz, Gudrun Przybilla, Karl-Heinz Schuller, Bernd Cord
Patented Case
View Patent ↗
Granted: Mar 29, 1988
Filed: Aug 15, 1986
Inventors
Peter Wirz
Gudrun Przybilla
Karl-Heinz Schuller
Bernd Cord
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.