IP Library Granted Patent US 4,736,760
Granted Patent Utility
US 4,736,760 · App. 06/907,249

Apparatus for cleaning, rinsing and drying substrates

Inventors: Robert A. Coberly, Mark J. Beck, Dan S. Azlin, Karl Joseph Gifford
Patented Case View Patent ↗
Granted: Apr 12, 1988 Filed: Sep 15, 1986
Inventors
Robert A. Coberly
Mark J. Beck
Dan S. Azlin
Karl Joseph Gifford
Assignee (at issue)
Robert A. Coberly

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Quick Facts
Patent No.
US 4,736,760
App. No.
06/907,249
Filed
1986-09-15
Granted
1988-04-12
Kind
A