Granted Patent
Utility
US 4,744,663 · App. 06/808,932
Pattern position detection apparatus using laser beam
Inventors:
Muneki Hamashima, Kinya Kato
Patented Case
View Patent ↗
Granted: May 17, 1988
Filed: Dec 13, 1985
Inventors
Muneki Hamashima
Kinya Kato
Assignee (at issue)
Nippon Kogaku K.K.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.