Granted Patent
Utility
US 4,745,287 · App. 06/922,319
Ion implantation with variable implant angle
Inventor:
Norman L. Turner
Patented Case
View Patent ↗
Granted: May 17, 1988
Filed: Oct 23, 1986
Inventor
Norman L. Turner
Assignee (at issue)
Ionex/HEI Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.