Granted Patent
Utility
US 4,746,417 · App. 06/896,927
Magnetron sputtering cathode for vacuum coating apparatus
Inventors:
Dagmar Ferenbach, Gerhard Steiniger, Jurgen Muller
Patented Case
View Patent ↗
Granted: May 24, 1988
Filed: Aug 15, 1986
Inventors
Dagmar Ferenbach
Gerhard Steiniger
Jurgen Muller
Assignee (at issue)
Leybold-Heraeus GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.