IP Library Granted Patent US 4,746,621
Granted Patent Utility
US 4,746,621 · App. 06/938,498

Planar tungsten interconnect

Inventors: David C. Thomas, S. Simon Wong
Patented Case View Patent ↗
Granted: May 24, 1988 Filed: Dec 5, 1986
Inventors
David C. Thomas
S. Simon Wong
Assignee (at issue)
Cornell Research Foundation, Inc.

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Quick Facts
Patent No.
US 4,746,621
App. No.
06/938,498
Filed
1986-12-05
Granted
1988-05-24
Kind
A